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1 Ergebnisse
1
Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trac..:
Seoudi, Tarek
;
Charensol, Julien
;
Trzpil, Wioletta
...
info:eu-repo/semantics/altIdentifier/doi/10.3390/s23063280. , 2023
Link:
https://hal.science/hal-04053771
RT Journal T1
Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace Detection
UL https://suche.suub.uni-bremen.de/peid=base-ftanrparis:oai:HAL:hal-04053771v1&Exemplar=1&LAN=DE A1 Seoudi, Tarek A1 Charensol, Julien A1 Trzpil, Wioletta A1 Pages, Fanny A1 Ayache, Diba A1 Rousseau, Roman A1 Vicet, Aurore A1 Bahriz, Michael PB HAL CCSD; MDPI YR 2023 K1 Seoudi K1 T. Charensol K1 J. Trzpil K1 W. Pages K1 F. Ayache K1 D. Rousseau K1 R. Vicet K1 A. Bahriz K1 M. Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace photoacoustic spectroscopy gas sensor micro-mechanical resonator MEMS capacitive transduction K1 T K1 Charensol K1 J K1 Trzpil K1 W K1 Pages K1 F K1 Ayache K1 D K1 Rousseau K1 R K1 Vicet K1 A K1 Bahriz K1 M. Highly Sensitive Capacitive MEMS for Photoacoustic Gas Trace photoacoustic spectroscopy K1 gas sensor K1 micro-mechanical resonator K1 MEMS K1 capacitive transduction K1 [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] JF info:eu-repo/semantics/altIdentifier/doi/10.3390/s23063280 LK http://dx.doi.org/https://hal.science/hal-04053771 DO https://hal.science/hal-04053771 SF ELIB - SuUB Bremen
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