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Development of O2 plasma etching for the fabrication of dia..:
Gourad, Raid
;
Makhoul, Ralph
;
Isoird, Karine
...
hal-04127068. , 2023
Link:
https://laas.hal.science/hal-04127068
RT Journal T1
Development of O2 plasma etching for the fabrication of diamond power devices ; Développement de la gravure plasma O2 pour la réalisation de composants de puissance diamant
UL https://suche.suub.uni-bremen.de/peid=base-ftanrparis:oai:HAL:hal-04127068v1&Exemplar=1&LAN=DE A1 Gourad, Raid A1 Makhoul, Ralph A1 Isoird, Karine A1 Tasselli, Josiane A1 Cazarré, Alain A1 Lecestre, Aurélie A1 Libaude, Guillaume PB HAL CCSD YR 2023 K1 Diamond K1 MOS - Metal Oxide SemiConductor - Component K1 Reactive ion etching K1 Diamant K1 MOS K1 gravure sèche RIE K1 [SPI]Engineering Sciences [physics] JF hal-04127068 LK http://dx.doi.org/https://laas.hal.science/hal-04127068 DO https://laas.hal.science/hal-04127068 SF ELIB - SuUB Bremen
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