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Wafer-Scale Performance Mapping of Magnetron-Sputtered Tern..:
Dinh, Khac Huy
;
Robert, Kevin
;
Thuriot-Roukos, Joelle
...
info:eu-repo/semantics/altIdentifier/doi/10.1021/acs.chemmater.3c01803. , 2023
Link:
https://hal.science/hal-04241602
RT Journal T1 <Title>Wafer-Scale Performance Mapping of Magnetron-Sputtered Ternary Vanadium Tungsten Nitride for Microsupercapacitors</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftanrparis:oai:HAL:hal-04241602v1&Exemplar=1&LAN=DE A1 Dinh, Khac Huy A1 Robert, Kevin A1 Thuriot-Roukos, Joelle A1 Huvé, Marielle A1 Simon, Pardis A1 Troadec, David A1 Lethien, Christophe A1 Roussel, Pascal PB HAL CCSD; American Chemical Society YR 2023 K1 [CHIM.MATE]Chemical Sciences/Material chemistry K1 [SPI.NRJ]Engineering Sciences [physics]/Electric power JF info:eu-repo/semantics/altIdentifier/doi/10.1021/acs.chemmater.3c01803 LK http://dx.doi.org/https://hal.science/hal-04241602 DO https://hal.science/hal-04241602 SF ELIB - SuUB Bremen
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