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Finite Size Effects in Highly Scaled Ruthenium Interconnect:
Dutta, Shibesh
;
Moors, Kristof
;
Vandemaele, Michiel
.
http://arxiv.org/abs/1712.03859. , 2017
Link:
http://arxiv.org/abs/1712.03859
RT Journal T1
Finite Size Effects in Highly Scaled Ruthenium Interconnects
UL https://suche.suub.uni-bremen.de/peid=base-ftarxivpreprints:oai:arXiv.org:1712.03859&Exemplar=1&LAN=DE A1 Dutta, Shibesh A1 Moors, Kristof A1 Vandemaele, Michiel A1 Adelmann, Christoph YR 2017 K1 Condensed Matter - Materials Science JF http://arxiv.org/abs/1712.03859 LK http://arxiv.org/abs/1712.03859 DO http://arxiv.org/abs/1712.03859 SF ELIB - SuUB Bremen
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