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1 Ergebnisse
1
"Zero change" platform for monolithic back-end-of-line inte..:
Wei, Maoliang
;
Xu, Kai
;
Tang, Bo
...
http://arxiv.org/abs/2308.15723. , 2023
Link:
http://arxiv.org/abs/2308.15723
RT Journal T1
"Zero change" platform for monolithic back-end-of-line integration of phase change materials in silicon photonics
UL https://suche.suub.uni-bremen.de/peid=base-ftarxivpreprints:oai:arXiv.org:2308.15723&Exemplar=1&LAN=DE A1 Wei, Maoliang A1 Xu, Kai A1 Tang, Bo A1 Li, Junying A1 Yun, Yiting A1 Zhang, Peng A1 Wu, Yingchun A1 Bao, Kangjian A1 Lei, Kunhao A1 Chen, Zequn A1 Ma, Hui A1 Sun, Chunlei A1 Liu, Ruonan A1 Li, Ming A1 Li, Lan A1 Lin, Hongtao YR 2023 K1 Physics - Optics K1 Physics - Applied Physics JF http://arxiv.org/abs/2308.15723 LK http://arxiv.org/abs/2308.15723 DO http://arxiv.org/abs/2308.15723 SF ELIB - SuUB Bremen
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