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1 Ergebnisse
1
Chip-level CMP Modeling and Smart Dummy for HDP and Conform..:
Liu, George Yong
;
Zhang, Ray F
;
Hsu, Kelvin
.
http://arxiv.org/abs/cs/0011014. , 2000
Link:
http://arxiv.org/abs/cs/0011014
RT Journal T1
Chip-level CMP Modeling and Smart Dummy for HDP and Conformal CVD Films
UL https://suche.suub.uni-bremen.de/peid=base-ftarxivpreprints:oai:arXiv.org:cs_0011014&Exemplar=1&LAN=DE A1 Liu, George Yong A1 Zhang, Ray F A1 Hsu, Kelvin A1 Camilletti, Lawrence YR 2000 K1 Computer Science - Computational Engineering K1 Finance K1 and Science K1 B.7.2 JF http://arxiv.org/abs/cs/0011014 LK http://arxiv.org/abs/cs/0011014 DO http://arxiv.org/abs/cs/0011014 SF ELIB - SuUB Bremen
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