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1 Ergebnisse
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Mechanisms of Low-Temperature Nitridation Technology on a T..:
Chen, Huey-Ru
;
Chen, Ying-Chung
;
Chang, Ting-Chang
...
http://www.nanoscalereslett.com/content/11/1/275. , 2016
Link:
http://www.nanoscalereslett.com/content/11/1/275
RT Journal T1 <Title>Mechanisms of Low-Temperature Nitridation Technology on a TaN Thin Film Resistor for Temperature Sensor Applications</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftbiomed:oai:biomedcentral.com:s11671-016-1480-z&Exemplar=1&LAN=DE A1 Chen, Huey-Ru A1 Chen, Ying-Chung A1 Chang, Ting-Chang A1 Chang, Kuan-Chang A1 Tsai, Tsung-Ming A1 Chu, Tian-Jian A1 Shih, Chih-Cheng A1 Chuang, Nai-Chuan A1 Wang, Kao-Yuan PB BioMed Central Ltd. YR 2016 K1 TaN K1 Thin film resistor K1 Temperature coefficient of resistance K1 SCCO2 JF http://www.nanoscalereslett.com/content/11/1/275 LK http://www.nanoscalereslett.com/content/11/1/275 DO http://www.nanoscalereslett.com/content/11/1/275 SF ELIB - SuUB Bremen
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