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1 Ergebnisse
1
Process parameter-growth environment-film property relation..:
Kwok, Chee-Kin
;
Aita, Carolyn Rubin
;
Kolawa, Elzbieta
https://doi.org/10.1116/1.576876. , 1990
Link:
https://doi.org/10.1116/1.576876
RT Journal T1
Process parameter-growth environment-film property relationships for the sputter deposited yttrium-oxygen system
UL https://suche.suub.uni-bremen.de/peid=base-ftcaltechauth:oai:authors.library.caltech.edu:530wk-d0q59&Exemplar=1&LAN=DE A1 Kwok, Chee-Kin A1 Aita, Carolyn Rubin A1 Kolawa, Elzbieta PB American Vacuum Society YR 1990 K1 FILM GROWTH K1 BAND STRUCTURE K1 CATHODE SPUTTERING K1 EMISSION SPECTROSCOPY K1 YTTRIUM K1 OXYGEN K1 HIGH−FREQUENCY DISCHARGES K1 ELECTRIC CONDUCTIVITY K1 CRYSTAL STRUCTURE K1 THIN FILMS K1 ENERGY−LEVEL TRANSITIONS JF https://doi.org/10.1116/1.576876 LK http://dx.doi.org/https://doi.org/10.1116/1.576876 DO https://doi.org/10.1116/1.576876 SF ELIB - SuUB Bremen
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