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Elemental depth profiling in transparent conducting oxide t..:

Rotella, H ; Caby, B ; Ménesguen, Y...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sab.2017.06.011. , 2017

Link: https://hal-cea.archives-ouvertes.fr/cea-02957331

RT Journal
T1 <Title>Elemental depth profiling in transparent conducting oxide thin film by X-ray reflectivity and grazing incidence X-ray fluorescence combined analysis</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftccsdartic:oai:HAL:cea-02957331v1&Exemplar=1&LAN=DE
				
A1 Rotella, H
A1 Caby, B
A1 Ménesguen, Y
A1 Mazel, Y
A1 Valla, A
A1 Ingerle, D
A1 Detlefs, B
A1 Lépy, M.-C
A1 Novikova, A
A1 Rodriguez, G
A1 Streli, C
A1 Nolot, E
PB HAL CCSD; Elsevier
YR 2017
K1 thin film
K1 Grazing-Incidence X-ray Fluorescence (GIXRF)
K1 X-ray reflectometry (XRR)
K1 Depth profiling
K1 Transparent conducting oxide
K1 non-destructive characterization
K1 instrumentation
K1 structural properties
K1 chemical properties
K1 optical properties
K1 annealing
K1 spectroscopic ellipsometry
K1 ionizing radiation
K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.sab.2017.06.011
LK http://dx.doi.org/https://hal-cea.archives-ouvertes.fr/cea-02957331
DO https://hal-cea.archives-ouvertes.fr/cea-02957331
SF ELIB - SuUB Bremen

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