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Improved resolution of submicron KrF laser ablation of poly..:
Miyamoto, Isamu
;
Helvajian, Henry
;
Itoh, Kazuyoshi
...
hal-00004354. , 2004
Link:
https://hal.archives-ouvertes.fr/hal-00004354
RT Journal T1
Improved resolution of submicron KrF laser ablation of polymers by a new filtered imaging irradiation
UL https://suche.suub.uni-bremen.de/peid=base-ftccsdartic:oai:HAL:hal-00004354v1&Exemplar=1&LAN=DE A1 Miyamoto, Isamu A1 Helvajian, Henry A1 Itoh, Kazuyoshi A1 Kobayashi, Kojiro F A1 Ostendorf, Andreas A1 Sugioka, Koji A1 Weisbuch, F A1 Tokarev, V A1 Débarre, D PB HAL CCSD; SPIE YR 2004 K1 Keywords: Materials K1 laser K1 precision projection lens K1 filtering K1 grating K1 resolution K1 mechanisms K1 microscopy K1 polymer K1 42.62 K1 61.82 K1 42.70-a K1 [PHYS.PHYS.PHYS-CHEM-PH]Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph] JF hal-00004354 LK http://dx.doi.org/https://hal.archives-ouvertes.fr/hal-00004354 DO https://hal.archives-ouvertes.fr/hal-00004354 SF ELIB - SuUB Bremen
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