I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Plasma deposition—Impact of ions in plasma enhanced chemica..:
Vallee, Christophe
;
Bonvalot, Marceline
;
Belahcen, Samia
...
info:eu-repo/semantics/altIdentifier/doi/10.1116/1.5140841. , 2020
Link:
https://hal.archives-ouvertes.fr/hal-02586207
RT Journal T1
Plasma deposition—Impact of ions in plasma enhanced chemical vapor deposition, plasma enhanced atomic layer deposition, and applications to area selective deposition
UL https://suche.suub.uni-bremen.de/peid=base-ftccsdartic:oai:HAL:hal-02586207v1&Exemplar=1&LAN=DE A1 Vallee, Christophe A1 Bonvalot, Marceline A1 Belahcen, Samia A1 Yeghoyan, Taguhi A1 Jaffal, Moustapha A1 Vallat, Rémi A1 Chaker, Ahmad A1 Lefèvre, Gautier A1 David, Sylvain A1 Bsiesy, Ahmad A1 Posseme, Nicolas A1 Gassilloud, Rémy A1 Granier, Agnès PB HAL CCSD; American Vacuum Society YR 2020 K1 [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] JF info:eu-repo/semantics/altIdentifier/doi/10.1116/1.5140841 LK http://dx.doi.org/https://hal.archives-ouvertes.fr/hal-02586207 DO https://hal.archives-ouvertes.fr/hal-02586207 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)