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Structural, optical, and electrical properties of TiO$_2$ t..:

Jolivet, Aline ; Labbé, Christophe ; Frilay, Cédric...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.apsusc.2022.155214. , 2023

Link: https://hal.science/hal-03807517

RT Journal
T1 <Title>Structural, optical, and electrical properties of TiO$_2$ thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftccsdartic:oai:HAL:hal-03807517v1&Exemplar=1&LAN=DE
				
A1 Jolivet, Aline
A1 Labbé, Christophe
A1 Frilay, Cédric
A1 Debieu, Olivier
A1 Marie, Philippe
A1 Horcholle, Bryan
A1 Lemarié, Franck
A1 Portier, Xavier
A1 Grygiel, Clara
A1 Duprey, Sylvain
A1 Jadwisienczak, Wojciech
A1 Ingram, David
A1 Upadhyay, Mudit
A1 David, Adrian
A1 Fouchet, Arnaud
A1 Lüders, Ulrike
A1 Cardin, Julien
PB HAL CCSD; Elsevier
YR 2023
K1 [SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
K1 [CHIM.MATE]Chemical Sciences/Material chemistry
K1 [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
K1 [PHYS.PHYS.PHYS-COMP-PH]Physics [physics]/Physics [physics]/Computational Physics [physics.comp-ph]
K1 [PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics]
K1 [SPI.ELEC]Engineering Sciences [physics]/Electromagnetism
K1 [SPI.MAT]Engineering Sciences [physics]/Materials
K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.apsusc.2022.155214
LK http://dx.doi.org/https://hal.science/hal-03807517
DO https://hal.science/hal-03807517
SF ELIB - SuUB Bremen

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