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1 Ergebnisse
1
Backside cavities for thermal tuning optimization of silico..:
Tissier, Pierre
;
Hassan, Karim
;
Reboud, Vincent
...
info:eu-repo/semantics/altIdentifier/doi/10.1109/ECTC32696.2021.00264. , 2021
Link:
https://hal.science/hal-04414706
RT Journal T1 <Title>Backside cavities for thermal tuning optimization of silicon ring resonators</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftccsdartic:oai:HAL:hal-04414706v1&Exemplar=1&LAN=DE A1 Tissier, Pierre A1 Hassan, Karim A1 Reboud, Vincent A1 Velard, Remi A1 Grosse, Philippe A1 Bernabe, Stephane A1 Charbonnier, Jean A1 Thonnart, Yvain A1 Farcy, Alexis A1 Ponthenier, Fabienne A1 Charbonnier, Benoit A1 Broquin, Jean-Emmanuel PB HAL CCSD; IEEE YR 2021 K1 Silicon photonics K1 Three-dimensional integrated circuits K1 Optical resonators K1 Thermal management K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics JF info:eu-repo/semantics/altIdentifier/doi/10.1109/ECTC32696.2021.00264 LK http://dx.doi.org/https://hal.science/hal-04414706 DO https://hal.science/hal-04414706 SF ELIB - SuUB Bremen
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