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Kinetic Processes in the CVD of SiC from CH3SiCl3-H2 in a V..:

Langlais, F ; Loumagne, F ; Lespiaux, D..
info:eu-repo/semantics/altIdentifier/doi/10.1051/jphyscol:1995510.  , 1995
Link: https://hal.archives-ouvertes.fr/jpa-00253766