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1 Ergebnisse
1
Characterization and industrial control of local stress in ..:
DURAND, Aurèle
tel-01562672. , 2016
Link:
https://hal.archives-ouvertes.fr/tel-01562672
RT Journal T1
Characterization and industrial control of local stress in microelectronics ; Caractérisation et contrôle industriel des contraintes locales en microélectronique ; Characterization and industrial control of local stress in microelectronics: Application to advanced 14 nm technology transistor ; Caractérisation et contrôle industriel des contraintes locales en microélectronique: Application aux transistors de technologie 14nm
UL https://suche.suub.uni-bremen.de/peid=base-ftccsdartic:oai:HAL:tel-01562672v1&Exemplar=1&LAN=DE A1 DURAND, Aurèle PB HAL CCSD YR 2016 K1 Raman K1 SiGe K1 metrology K1 HRXRD K1 strain K1 DFEH K1 pMOS K1 RSM K1 simulation K1 métrologie K1 déformation K1 [PHYS.PHYS.PHYS-GEN-PH]Physics [physics]/Physics [physics]/General Physics [physics.gen-ph] K1 [PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] K1 [PHYS.MECA.MEMA]Physics [physics]/Mechanics [physics]/Mechanics of materials [physics.class-ph] K1 [PHYS.PHYS.PHYS-DATA-AN]Physics [physics]/Physics [physics]/Data Analysis K1 Statistics and Probability [physics.data-an] K1 [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det] JF tel-01562672 LK http://dx.doi.org/https://hal.archives-ouvertes.fr/tel-01562672 DO https://hal.archives-ouvertes.fr/tel-01562672 SF ELIB - SuUB Bremen
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