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1 Ergebnisse
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Nondestructive, high-resolution, chemically specific 3D nan..:
Tanksalvala, Michael
;
Porter, Christina
;
Esashi, Yuka
...
qt19n3t5q0. , 2021
Link:
https://escholarship.org/uc/item/19n3t5q0
RT Journal T1
Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry
UL https://suche.suub.uni-bremen.de/peid=base-ftcdlib:oai:escholarship.org:ark:_13030_qt19n3t5q0&Exemplar=1&LAN=DE A1 Tanksalvala, Michael A1 Porter, Christina A1 Esashi, Yuka A1 Wang, Bin A1 Jenkins, Nicholas A1 Zhang, Zhe A1 Miley, Galen A1 Knobloch, Joshua A1 McBennett, Brendan A1 Horiguchi, Naoto A1 Yazdi, Sadegh A1 Zhou, Jihan A1 Jacobs, Matthew A1 Bevis, Charles A1 Karl, Robert A1 Johnsen, Peter A1 Ren, David A1 Waller, Laura A1 Adams, Daniel A1 Cousin, Seth A1 Liao, Chen-Ting A1 Miao, Jianwei A1 Gerrity, Michael A1 Kapteyn, Henry A1 Murnane, Margaret PB eScholarship, University of California YR 2021 JF qt19n3t5q0 LK http://dx.doi.org/https://escholarship.org/uc/item/19n3t5q0 DO https://escholarship.org/uc/item/19n3t5q0 SF ELIB - SuUB Bremen
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