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Performance of actinic EUVL mask imaging using a zoneplate ..:
Goldberg, Kenneth A
;
Naulleau, Patrick P
;
Barty, Anton
...
qt2889p68b. , 2007
Link:
https://escholarship.org/uc/item/2889p68b
RT Journal T1
Performance of actinic EUVL mask imaging using a zoneplate microscope
UL https://suche.suub.uni-bremen.de/peid=base-ftcdlib:oai:escholarship.org:ark:_13030_qt2889p68b&Exemplar=1&LAN=DE A1 Goldberg, Kenneth A A1 Naulleau, Patrick P A1 Barty, Anton A1 Rekawa, Senajith B A1 Kemp, Charles D A1 Gunion, Robert F A1 Salmassi, Farhad A1 Gullikson, Eric M A1 Anderson, Erik H A1 Han, Hak-Seung PB eScholarship, University of California YR 2007 K1 Materials science JF qt2889p68b LK http://dx.doi.org/https://escholarship.org/uc/item/2889p68b DO https://escholarship.org/uc/item/2889p68b SF ELIB - SuUB Bremen
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