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Fabrication of low blaze angle gratings by replication and ..:
Park, Sooyeon
;
Voronov, Dmitriy L
;
Wojdyla, Antoine
...
qt8ch5c1xz. , 2022
Link:
https://escholarship.org/uc/item/8ch5c1xz
RT Journal T1
Fabrication of low blaze angle gratings by replication and plasma etch
UL https://suche.suub.uni-bremen.de/peid=base-ftcdlib:oai:escholarship.org:ark:_13030_qt8ch5c1xz&Exemplar=1&LAN=DE A1 Park, Sooyeon A1 Voronov, Dmitriy L A1 Wojdyla, Antoine A1 Gullikson, Eric M A1 Salmassi, Fahard A1 Padmore, Howard A PB eScholarship, University of California YR 2022 K1 Manufacturing Engineering K1 Engineering K1 ALS-U K1 x-ray diffraction gratings K1 blaze angle K1 saw-tooth gratings K1 nanoimprinting K1 plasma etching K1 angle reduction K1 diffraction efficiency K1 Communications engineering K1 Electronics K1 sensors and digital hardware K1 Atomic K1 molecular and optical physics JF qt8ch5c1xz LK http://dx.doi.org/https://escholarship.org/uc/item/8ch5c1xz DO https://escholarship.org/uc/item/8ch5c1xz SF ELIB - SuUB Bremen
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