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1 Ergebnisse
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Multifunctional light beam source for surface slope measuri..:
Yashchuk, Valeriy V
;
Lacey, Ian
;
Anderson, Kevan
...
qt9mc3z925. , 2020
Link:
https://escholarship.org/uc/item/9mc3z925
RT Journal T1
Multifunctional light beam source for surface slope measuring long trace profilers
UL https://suche.suub.uni-bremen.de/peid=base-ftcdlib:oai:escholarship.org:ark:_13030_qt9mc3z925&Exemplar=1&LAN=DE A1 Yashchuk, Valeriy V A1 Lacey, Ian A1 Anderson, Kevan A1 Dickert, Jeff A1 Smith, Brian V A1 Takacs, Peter Z PB eScholarship, University of California YR 2020 K1 Atomic K1 Molecular and Optical Physics K1 Physical Sciences K1 x-ray optics K1 optical metrology K1 surface slope profilometry K1 LTP K1 pencil beam interferometry K1 light beamsource K1 optical sensor K1 error reduction K1 Communications engineering K1 Electronics K1 sensors and digital hardware JF qt9mc3z925 LK http://dx.doi.org/https://escholarship.org/uc/item/9mc3z925 DO https://escholarship.org/uc/item/9mc3z925 SF ELIB - SuUB Bremen
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