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Evaluation of plasma parameters on PEALD deposited TaCN:
Piallat, Fabien
;
Beugin, Virginie
;
Gassilloud, Remy
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2012.08.020. , 2013
Link:
https://hal.science/hal-00908477
RT Journal T1 <Title>Evaluation of plasma parameters on PEALD deposited TaCN</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftceafr:oai:HAL:hal-00908477v1&Exemplar=1&LAN=DE A1 Piallat, Fabien A1 Beugin, Virginie A1 Gassilloud, Remy A1 Michallon, Philippe A1 Dussault, Laurent A1 Pelissier, Bernard A1 Asikainen, Timo A1 Maes, Jan Willem A1 Martin, François A1 Morin, Pierre A1 Vallée, Christophe PB HAL CCSD; Elsevier YR 2013 K1 [SPI.TRON]Engineering Sciences [physics]/Electronics JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mee.2012.08.020 LK http://dx.doi.org/https://hal.science/hal-00908477 DO https://hal.science/hal-00908477 SF ELIB - SuUB Bremen
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