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Scaling-down lithographic dimensions with block-copolymer m..:
Chevalier, X
;
Nicolet, C
;
Tiron, R
...
info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2011405. , 2013
Link:
https://hal.science/hal-00944986
RT Journal T1 <Title>Scaling-down lithographic dimensions with block-copolymer materials: 10nm-sized features with PS-b-PMMA</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftceafr:oai:HAL:hal-00944986v1&Exemplar=1&LAN=DE A1 Chevalier, X A1 Nicolet, C A1 Tiron, R A1 Gharbi, A A1 Argoud, M A1 Pradelles, J A1 Delalande, M A1 Cunge, G A1 Fleury, G A1 Hadziioannou, G A1 Navarro, C PB HAL CCSD YR 2013 K1 lithography K1 block-copolymer K1 self-assembly K1 PS-b-PMMA K1 graphoepitaxy K1 [SPI]Engineering Sciences [physics] JF info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2011405 LK http://dx.doi.org/https://hal.science/hal-00944986 DO https://hal.science/hal-00944986 SF ELIB - SuUB Bremen
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