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1 Ergebnisse
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Demonstration of BEOL-compatible ferroelectric Hf 0.5 Zr 0...:
Francois, T
;
Grenouillet, L
;
Coignus, J
...
info:eu-repo/semantics/altIdentifier/doi/10.1109/IEDM19573.2019.8993485. , 2019
Link:
https://hal.science/hal-02399654
RT Journal T1 <Title>Demonstration of BEOL-compatible ferroelectric Hf 0.5 Zr 0.5 O 2 scaled FeRAM co-integrated with 130nm CMOS for embedded NVM applications</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftceafr:oai:HAL:hal-02399654v1&Exemplar=1&LAN=DE A1 Francois, T A1 Grenouillet, L A1 Coignus, J A1 Blaise, P A1 Carabasse, C A1 Vaxelaire, N A1 Magis, T A1 Aussenac, F A1 Loup, V A1 Pellissier, C A1 Slesazeck, S A1 Havel, V A1 Richter, C A1 Makosiej, A A1 Giraud, B A1 Breyer, E, T A1 Materano, M A1 Chiquet, P A1 Bocquet, Marc A1 Nowak, E A1 Schroeder, U A1 Gaillard, F PB HAL CCSD YR 2019 K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics JF info:eu-repo/semantics/altIdentifier/doi/10.1109/IEDM19573.2019.8993485 LK http://dx.doi.org/https://hal.science/hal-02399654 DO https://hal.science/hal-02399654 SF ELIB - SuUB Bremen
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