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Dark-field electron holography as a recording of crystal di..:

Boureau, Victor ; Durand, Aurèle ; Gergaud, Patrice...
info:eu-repo/semantics/altIdentifier/doi/10.1107/S1600576720006020. , 2020

Link: https://hal.science/hal-03001931

RT Journal
T1 <Title>Dark-field electron holography as a recording of crystal diffraction in real space: a comparative study with high-resolution X-ray diffraction for strain analysis of MOSFETs</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftceafr:oai:HAL:hal-03001931v1&Exemplar=1&LAN=DE
				
A1 Boureau, Victor
A1 Durand, Aurèle
A1 Gergaud, Patrice
A1 Le Cunff, Delphine
A1 Wormington, Matthew
A1 Rouchon, Denis
A1 Claverie, Alain
A1 Benoit, Daniel
A1 Hÿtch, Martin
PB HAL CCSD; International Union of Crystallography
YR 2020
K1 diffraction
K1 elastic strain
K1 geometric phase
K1 dark-field electron holography (DFEH)
K1 high-resolution xray diffraction (HRXRD)
K1 metal-oxide-semiconductor field-effect-transistor (MOSFET)
K1 [PHYS.PHYS.PHYS-INS-DET]Physics [physics]/Physics [physics]/Instrumentation and Detectors [physics.ins-det]
K1 [PHYS.MECA.MSMECA]Physics [physics]/Mechanics [physics]/Materials and structures in mechanics [physics.class-ph]
K1 [CHIM.CRIS]Chemical Sciences/Cristallography
K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
JF info:eu-repo/semantics/altIdentifier/doi/10.1107/S1600576720006020
LK http://dx.doi.org/https://hal.science/hal-03001931
DO https://hal.science/hal-03001931
SF ELIB - SuUB Bremen

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