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Parasitic coupling in 3D equential integration: the example..:

Sideris, Petros ; Peizerat, Arnaud ; Batude, Perrine..
info:eu-repo/semantics/altIdentifier/doi/10.3390/technologies10020038. , 2022

Link: https://hal.science/hal-03876789

RT Journal
T1 <Title>Parasitic coupling in 3D equential integration: the example of a two-layer 3D pixel</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftceafr:oai:HAL:hal-03876789v1&Exemplar=1&LAN=DE
				
A1 Sideris, Petros
A1 Peizerat, Arnaud
A1 Batude, Perrine
A1 Sicard, Gilles
A1 Theodorou, Christoforos
PB HAL CCSD; MDPI
YR 2022
K1 image sensors 3D pixels 3D sequential integration 3DSI monolithic 3D M3D coupling parasitic capacitances
K1 image sensors
K1 3D pixels
K1 3D sequential integration
K1 3DSI
K1 monolithic 3D
K1 M3D
K1 coupling
K1 parasitic capacitances
K1 [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
K1 [SPI.TRON]Engineering Sciences [physics]/Electronics
K1 [PHYS.PHYS.PHYS-DATA-AN]Physics [physics]/Physics [physics]/Data Analysis
K1 Statistics and Probability [physics.data-an]
JF info:eu-repo/semantics/altIdentifier/doi/10.3390/technologies10020038
LK http://dx.doi.org/https://hal.science/hal-03876789
DO https://hal.science/hal-03876789
SF ELIB - SuUB Bremen

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