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1 Ergebnisse
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Sensitivity analysis of optical scatterometry technique for..:
Grasland, Justine
;
Le Cunff, Delphine
;
Pham, Hoang Lam
..
info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2657876. , 2023
Link:
https://hal.science/hal-04238878
RT Journal T1
Sensitivity analysis of optical scatterometry technique for high-aspect ratio trench measurement
UL https://suche.suub.uni-bremen.de/peid=base-ftceafr:oai:HAL:hal-04238878v1&Exemplar=1&LAN=DE A1 Grasland, Justine A1 Le Cunff, Delphine A1 Pham, Hoang Lam A1 Besacier, Maxime A1 Tortai, Jean-Hervé PB HAL CCSD YR 2023 K1 metrology K1 trenches K1 OCD K1 RCWA K1 sensitivity analysis K1 Sobol index K1 Mueller matrix K1 [SPI]Engineering Sciences [physics] JF info:eu-repo/semantics/altIdentifier/doi/10.1117/12.2657876 LK http://dx.doi.org/https://hal.science/hal-04238878 DO https://hal.science/hal-04238878 SF ELIB - SuUB Bremen
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