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1 Ergebnisse
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Investigation of Mn-doped Si films prepared by magnetron co..:
Liu LF
;
Chen NF
;
Wang Y
...
JOURNAL OF CRYSTAL GROWTH. , 2006
Link:
http://ir.semi.ac.cn/handle/172111/10620
RT Journal T1
Investigation of Mn-doped Si films prepared by magnetron cosputtering
UL https://suche.suub.uni-bremen.de/peid=base-ftchinacadscsemi:oai:ir.semi.ac.cn:172111_10620&Exemplar=1&LAN=DE A1 Liu LF A1 Chen NF A1 Wang Y A1 Yin ZG A1 Yang F A1 Chai CL A1 Zhang X A1 Liu, LF, Peking Univ, Inst Microelect, Beijing 100871, Peoples R China. E-mail: lfliu@ime.pku.edu.cn YR 2006 K1 Mn Doping K1 Magnetron Sputtering K1 Mnxsi1-x K1 Diluted Magnetic K1 Thin-films K1 Spin-photonics K1 Semiconductors K1 Growth K1 Ferromagnetism K1 Spintronics K1 半导体材料 K1 ion beam lithography K1 thin films K1 development K1 溅射 K1 focused ion beam technology K1 fib etching K1 fib technology K1 focused ion beam etching K1 ion beam applications K1 ion beam assisted deposition K1 ibad K1 ion lithography K1 ionised cluster beam deposition K1 ionized cluster beam deposition K1 sputter etching K1 ion etching K1 plasma ashing K1 plasma etching K1 reactive ion etching K1 reactive sputter etching K1 rie K1 sputtering K1 cathodic sputtering K1 dc sputtering K1 diode sputtering K1 radiofrequency sputtering K1 reactive sputtering K1 rf sputtering K1 triode sputtering K1 vacuum deposition K1 evaporation (film deposition) K1 vapour deposition K1 deposition techniques K1 vapor deposition K1 kathodenzerstaeubung JF JOURNAL OF CRYSTAL GROWTH LK http://ir.semi.ac.cn/handle/172111/10620 DO http://ir.semi.ac.cn/handle/172111/10620 SF ELIB - SuUB Bremen
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