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1 Ergebnisse
1
Multi-wafer 3C-SiC heteroepitaxial growth on Si(100) substr..:
Sun GS (Sun Guo-Sheng)
;
Liu XF (Liu Xing-Fang)
;
Wang L (Wang Lei)
...
CHINESE PHYSICS B. , 2010
Link:
http://ir.semi.ac.cn/handle/172111/13510
RT Journal T1
Multi-wafer 3C-SiC heteroepitaxial growth on Si(100) substrates
UL https://suche.suub.uni-bremen.de/peid=base-ftchinacadscsemi:oai:ir.semi.ac.cn:172111_13510&Exemplar=1&LAN=DE A1 Sun GS (Sun Guo-Sheng) A1 Liu XF (Liu Xing-Fang) A1 Wang L (Wang Lei) A1 Zhao WS (Zhao Wan-Shun) A1 Yang T (Yang Ting) A1 Wu HL (Wu Hai-Lei) A1 Yan GG (Yan Guo-Guo) A1 Zhao YM (Zhao Yong-Mei) A1 Ning J (Ning Jin) A1 Zeng YP (Zeng Yi-Ping) A1 Li JM (Li Jin-Min) YR 2010 K1 3c-sic K1 Heteroepitaxial K1 Multi-wafer K1 Uniformity K1 半导体材料 K1 variability K1 一致结构 K1 变异性 JF CHINESE PHYSICS B LK http://ir.semi.ac.cn/handle/172111/13510 DO http://ir.semi.ac.cn/handle/172111/13510 SF ELIB - SuUB Bremen
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