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1 Ergebnisse
1
Investigation of Mn-implanted n-Si by low-energy ion beam d..:
Liu LF
;
Chen NF
;
Song SL
...
JOURNAL OF CRYSTAL GROWTH. , 2005
Link:
http://ir.semi.ac.cn/handle/172111/8902
RT Journal T1
Investigation of Mn-implanted n-Si by low-energy ion beam deposition
UL https://suche.suub.uni-bremen.de/peid=base-ftchinacadscsemi:oai:ir.semi.ac.cn:172111_8902&Exemplar=1&LAN=DE A1 Liu LF A1 Chen NF A1 Song SL A1 Yin ZG A1 Yang F A1 Chai CL A1 Yang SY A1 Liu ZK A1 Liu, LF, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China. 电子邮箱地址: lfliu@red.semi.ac.cn YR 2005 K1 Auger Electron Spectroscopy K1 半导体材料 K1 aes (spectrum analysis) K1 auger microscopy K1 scanning K1 microscopy K1 scanning auger K1 sam (spectrum analysis) K1 scanning auger microscopy K1 atomic emission spectroscopy K1 aes K1 auger spectroscopy K1 electron spectroscopy (auger) K1 elektronenstrahl-mikrosonde K1 spectroscopie electronique auger JF JOURNAL OF CRYSTAL GROWTH LK http://ir.semi.ac.cn/handle/172111/8902 DO http://ir.semi.ac.cn/handle/172111/8902 SF ELIB - SuUB Bremen
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