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In situ optical diagnostic study of the atomic layer etchin..:
Gasvoda, Ryan J
;
Leick, Noemi
;
van de Steeg, Alex
...
2017 Graduate Research And Discovery Symposium (GRADS) posters and presentations. , 2017
Link:
http://hdl.handle.net/11124/170894
RT Journal T1 <Title>In situ optical diagnostic study of the atomic layer etching of SiO2, An</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftcolostateunidc:oai:mountainscholar.org:11124_170894&Exemplar=1&LAN=DE A1 Gasvoda, Ryan J A1 Leick, Noemi A1 van de Steeg, Alex A1 Ovanesyan, Rafiel A A1 Klein, Jeffrey M A1 Bhowmich, Ranadeep A1 Hudson, Eric A A1 Agarwal, Sumit PB Colorado School of Mines. Arthur Lakes Library YR 2017 JF 2017 Graduate Research And Discovery Symposium (GRADS) posters and presentations LK http://hdl.handle.net/11124/170894 DO http://hdl.handle.net/11124/170894 SF ELIB - SuUB Bremen
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