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Electron Beam Lithography and Dimensional Metrology for Fin..:
Petkov, Nikolay
;
Georgieva, Margarita
;
Bugu, Sinan
...
Syntax: info:eu-repo/grantAgreement/EU/H2020/871130/[EU]/[Access to European Infrastructure for Nanoelectronics]/[ASCENTPlus]. , 2023
Link:
https://sword.cit.ie/dptphysciart/118
RT Journal T1 <Title>Electron Beam Lithography and Dimensional Metrology for Fin and Nanowire Devices on Ge, SiGe and GeOI Substrates</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftcorkinsttechno:oai:sword.cit.ie:dptphysciart-1119&Exemplar=1&LAN=DE A1 Petkov, Nikolay A1 Georgieva, Margarita A1 Bugu, Sinan A1 Duffy, Ray A1 McCarthy, Brendan A1 Myronov, Maksym A1 Kelleher, Ann-Marie A1 Maxwell, Graeme A1 Fagas, Giorgos PB Elsevier YR 2023 K1 electron beam lithography K1 HSQ K1 Ge K1 high density lines K1 Physical Sciences and Mathematics K1 Physics JF Syntax: info:eu-repo/grantAgreement/EU/H2020/871130/[EU]/[Access to European Infrastructure for Nanoelectronics]/[ASCENTPlus] LK http://dx.doi.org/https://sword.cit.ie/dptphysciart/118 DO https://sword.cit.ie/dptphysciart/118 SF ELIB - SuUB Bremen
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