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Dimensional metrology in the macroscopic range with sub-nan..:

Hausotte, Tino ; Vorbringer-Dorozhovets, Nataliya ; Shen, Jing C..
Proceedings of the Institution of Mechanical Engineers -- Proc Instn Mech Engrs -- Proceedings of the Institution of Mechanical Engineers / B -- Journal of engineering manufacture -- http://www.bibliothek.uni-regensburg.de/ezeit/?2032745 -- http://journals.sagepub.com/home/pib -- 2041-2975 -- 2032745-6 -- 705259037 -- http://uri.gbv.de/document/gvk:ppn:324917694. , 2013

Link: https://doi.org/10.1177/0954405413476386

RT Journal
T1 <Title>Dimensional metrology in the macroscopic range with sub-nanometre resolution</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftdbthueringen:oai:www.db-thueringen.de:dbt_mods_00024796&Exemplar=1&LAN=DE
				
A1 Hausotte, Tino
A1 Vorbringer-Dorozhovets, Nataliya
A1 Shen, Jing C
A1 Manske, Eberhard
A1 Jäger, Gerd
YR 2013
K1 article
K1 ScholarlyArticle
K1 Klasse A
K1 für Harvesting bereitgestellt
K1 Thüringer Pflichtexemplare
K1 ddc:530
K1 Nanopositioning and nanomeasuring
K1 surface measurement
K1 long-range atomic force microscope
JF Proceedings of the Institution of Mechanical Engineers -- Proc Instn Mech Engrs -- Proceedings of the Institution of Mechanical Engineers / B -- Journal of engineering manufacture -- http://www.bibliothek.uni-regensburg.de/ezeit/?2032745 -- http://journals.sagepub.com/home/pib -- 2041-2975 -- 2032745-6 -- 705259037 -- http://uri.gbv.de/document/gvk:ppn:324917694
LK http://dx.doi.org/https://doi.org/10.1177/0954405413476386
DO https://doi.org/10.1177/0954405413476386
SF ELIB - SuUB Bremen

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