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1 Ergebnisse
1
Automated parameter extraction of ScAlN MEMS devices using ..:
Krey, Maximilian
;
Hähnlein, Bernd
;
Tonisch, Katja
..
Sensors -- 1424-8220 -- 2052857-7 -- http://uri.gbv.de/document/gvk:ppn:331640910 -- http://www.mdpi.com/journal/sensors -- http://www.ncbi.nlm.nih.gov/pmc/journals/1660/ -- http://www.bibliothek.uni-regensburg.de/ezeit/?2052857. , 2020
Link:
https://doi.org/10.3390/s20041001
RT Journal T1 <Title>Automated parameter extraction of ScAlN MEMS devices using an extended Euler-Bernoulli beam theory</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdbthueringen:oai:www.db-thueringen.de:dbt_mods_00040935&Exemplar=1&LAN=DE A1 Krey, Maximilian A1 Hähnlein, Bernd A1 Tonisch, Katja A1 Krischok, Stefan A1 Töpfer, Hannes YR 2020 K1 article K1 ScholarlyArticle K1 ddc:621.3 K1 MEMS K1 scandium aluminium nitride K1 magnetoelectric sensor K1 Young's modulus K1 automation K1 algorithm JF Sensors -- 1424-8220 -- 2052857-7 -- http://uri.gbv.de/document/gvk:ppn:331640910 -- http://www.mdpi.com/journal/sensors -- http://www.ncbi.nlm.nih.gov/pmc/journals/1660/ -- http://www.bibliothek.uni-regensburg.de/ezeit/?2052857 LK http://dx.doi.org/https://doi.org/10.3390/s20041001 DO https://doi.org/10.3390/s20041001 SF ELIB - SuUB Bremen
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