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1 Ergebnisse
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Graphene-All-Around Cobalt Interconnect with a Back-End-of-..:
Chi-Yuan Kuo
;
Jia-Heng Zhu
;
Yun-Ping Chiu
...
doi:10.1021/acs.nanolett.3c04833.s001. , 1753
Link:
https://doi.org/10.1021/acs.nanolett.3c04833.s001
RT Journal T1
Graphene-All-Around Cobalt Interconnect with a Back-End-of-Line Compatible Process
UL https://suche.suub.uni-bremen.de/peid=base-ftdeakinunifig:oai:figshare.com:article_25121960&Exemplar=1&LAN=DE A1 Chi-Yuan Kuo A1 Jia-Heng Zhu A1 Yun-Ping Chiu A1 I-Chih Ni A1 Mei-Hsin Chen A1 Yuh-Renn Wu A1 Chih-I Wu YR 1753 K1 Biophysics K1 Biochemistry K1 Cell Biology K1 Biotechnology K1 Cancer K1 Infectious Diseases K1 Computational Biology K1 Environmental Sciences not elsewhere classified K1 Chemical Sciences not elsewhere classified K1 Physical Sciences not elsewhere classified K1 resist external forces K1 ray photoelectron spectroscopy K1 indicates compatibility applications K1 generation interconnect materials K1 line compatible process K1 co interconnect within K1 around cobalt interconnect K1 thermal budget K1 grow directly K1 diffusion barrier K1 current density K1 co atom K1 cmos beol K1 beol ) JF doi:10.1021/acs.nanolett.3c04833.s001 LK http://dx.doi.org/https://doi.org/10.1021/acs.nanolett.3c04833.s001 DO https://doi.org/10.1021/acs.nanolett.3c04833.s001 SF ELIB - SuUB Bremen
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