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The Implementation of a Smart Sampling Scheme C2O Utilizing..:
Tze Chiang Tin
;
Saw Chin Tan
;
Hing Yong
...
https://ieeexplore.ieee.org/document/9508983/. , 2021
Link:
https://doi.org/10.1109/ACCESS.2021.3103235
RT Journal T1
The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:1af0ef8f16bd4ef98eb015984544eed7&Exemplar=1&LAN=DE A1 Tze Chiang Tin A1 Saw Chin Tan A1 Hing Yong A1 Jimmy Ook Hyun Kim A1 Eric Ken Yong Teo A1 Joanne Ching Yee Wong A1 Ching Kwang Lee A1 Peter Than A1 Angela Pei San Tan A1 Siew Chee Phang PB IEEE YR 2021 K1 Virtual metrology K1 overlay K1 classification K1 regression K1 data mining K1 smart sampling K1 Electrical engineering. Electronics. Nuclear engineering K1 TK1-9971 JF https://ieeexplore.ieee.org/document/9508983/ LK http://dx.doi.org/https://doi.org/10.1109/ACCESS.2021.3103235 DO https://doi.org/10.1109/ACCESS.2021.3103235 SF ELIB - SuUB Bremen
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