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1 Ergebnisse
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Effect of rare earth oxide CeO on the anodic bonding perfor..:
Chao Du
;
Cuirong Liu
;
Xu Yin
.
https://doi.org/10.1177/16878140211007712. , 2021
Link:
https://doi.org/10.1177/16878140211007712
RT Journal T1 <Title>Effect of rare earth oxide CeO on the anodic bonding performance of PEG-based MEMS encapsulation materials</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:38145283ba094d6bb603d6d2df536b47&Exemplar=1&LAN=DE A1 Chao Du A1 Cuirong Liu A1 Xu Yin A1 Haocheng Zhao PB SAGE Publishing YR 2021 K1 Mechanical engineering and machinery K1 TJ1-1570 JF https://doi.org/10.1177/16878140211007712 LK http://dx.doi.org/https://doi.org/10.1177/16878140211007712 DO https://doi.org/10.1177/16878140211007712 SF ELIB - SuUB Bremen
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