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Nanochip: a MEMS-Based Ultra-High Data Density Memory Devic:
Nickolai BELOV
;
Donald ADAMS
;
Тsung-Kuan CHOU
...
http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_82.pdf. , 2009
Link:
https://doaj.org/article/3c9eb1c9ab9a4ff5878eafc238c37..
RT Journal T1
Nanochip: a MEMS-Based Ultra-High Data Density Memory Device
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:3c9eb1c9ab9a4ff5878eafc238c37602&Exemplar=1&LAN=DE A1 Nickolai BELOV A1 Donald ADAMS A1 Тsung-Kuan CHOU A1 John HECK A1 Byong KIM A1 Gordon KNIGHT A1 Qing MA A1 Valluri RAO A1 Jong-Seung PARK A1 Robert STARK A1 Ghassan TCHELEPI PB IFSA Publishing, S.L. YR 2009 K1 Probe storage K1 CMOS-MEMS integration K1 Micro-mover K1 Cantilevers K1 Electromagnetic actuator K1 Electrostatic actuator K1 Technology (General) K1 T1-995 JF http://www.sensorsportal.com/HTML/DIGEST/october_09/P_SI_82.pdf LK http://dx.doi.org/https://doaj.org/article/3c9eb1c9ab9a4ff5878eafc238c37602 DO https://doaj.org/article/3c9eb1c9ab9a4ff5878eafc238c37602 SF ELIB - SuUB Bremen
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