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1 Ergebnisse
1
Remote Plasma Atomic Layer Deposition of SiN x Using Cyclos..:
Haewon Cho
;
Namgue Lee
;
Hyeongsu Choi
...
https://www.mdpi.com/2076-3417/9/17/3531. , 2019
Link:
https://doi.org/10.3390/app9173531
RT Journal T1
Remote Plasma Atomic Layer Deposition of SiN x Using Cyclosilazane and H 2 /N 2 Plasma
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:3cf5dfe8f0cc47b499fcf17af25fb8d4&Exemplar=1&LAN=DE A1 Haewon Cho A1 Namgue Lee A1 Hyeongsu Choi A1 Hyunwoo Park A1 Chanwon Jung A1 Seokhwi Song A1 Hyunwoo Yuk A1 Youngjoon Kim A1 Jong-Woo Kim A1 Keunsik Kim A1 Youngtae Choi A1 Suhyeon Park A1 Yurim Kwon A1 Hyeongtag Jeon PB MDPI AG YR 2019 K1 atomic layer deposition K1 remote plasma K1 SiN x thin films K1 Technology K1 T K1 Engineering (General). Civil engineering (General) K1 TA1-2040 K1 Biology (General) K1 QH301-705.5 K1 Physics K1 QC1-999 K1 Chemistry K1 QD1-999 JF https://www.mdpi.com/2076-3417/9/17/3531 LK http://dx.doi.org/https://doi.org/10.3390/app9173531 DO https://doi.org/10.3390/app9173531 SF ELIB - SuUB Bremen
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