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1 Ergebnisse
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Effects of amplitude modulated discharge on growth of nanop..:
Kunihiro Kamataki
;
Daiki Nagamatsu
;
Tao Yang
...
http://dx.doi.org/10.1063/5.0097691. , 2022
Link:
https://doi.org/10.1063/5.0097691
RT Journal T1
Effects of amplitude modulated discharge on growth of nanoparticles in TEOS/O2/Ar capacitively coupled plasma
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:3e31b4d16d1e464d8771b6a866a562d4&Exemplar=1&LAN=DE A1 Kunihiro Kamataki A1 Daiki Nagamatsu A1 Tao Yang A1 Kohei Abe A1 Akihiro Yamamoto A1 Iori Nagao A1 Toshiaki Arima A1 Michihiro Otaka A1 Yuma Yamamoto A1 Daisuke Yamashita A1 Takamasa Okumura A1 Naoto Yamashita A1 Naho Itagaki A1 Kazunori Koga A1 Masaharu Shiratani PB AIP Publishing LLC YR 2022 K1 Physics K1 QC1-999 JF http://dx.doi.org/10.1063/5.0097691 LK http://dx.doi.org/https://doi.org/10.1063/5.0097691 DO https://doi.org/10.1063/5.0097691 SF ELIB - SuUB Bremen
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