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1 Ergebnisse
1
High-fidelity and clean nanotransfer lithography using stru..:
Zhuofei Gan
;
Jingxuan Cai
;
Zhao Sun
...
https://doi.org/10.1038/s41378-022-00476-x. , 2023
Link:
https://doi.org/10.1038/s41378-022-00476-x
RT Journal T1
High-fidelity and clean nanotransfer lithography using structure-embedded and electrostatic-adhesive carriers
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:696642ca8990435993d0ce0863a01740&Exemplar=1&LAN=DE A1 Zhuofei Gan A1 Jingxuan Cai A1 Zhao Sun A1 Liyang Chen A1 Chuying Sun A1 Junyi Yu A1 Zeyu Liang A1 Siyi Min A1 Fei Han A1 Yu Liu A1 Xing Cheng A1 Shuhui Yu A1 Dehu Cui A1 Wen-Di Li PB Nature Publishing Group YR 2023 K1 Technology K1 T K1 Engineering (General). Civil engineering (General) K1 TA1-2040 JF https://doi.org/10.1038/s41378-022-00476-x LK http://dx.doi.org/https://doi.org/10.1038/s41378-022-00476-x DO https://doi.org/10.1038/s41378-022-00476-x SF ELIB - SuUB Bremen
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