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1 Ergebnisse
1
Low Temperature Thermal Atomic Layer Deposition of Aluminum..:
Yong Chan Jung
;
Su Min Hwang
;
Dan N. Le
...
https://www.mdpi.com/1996-1944/13/15/3387. , 2020
Link:
https://doi.org/10.3390/ma13153387
RT Journal T1
Low Temperature Thermal Atomic Layer Deposition of Aluminum Nitride Using Hydrazine as the Nitrogen Source
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:7beaa3f9330b4b4da0d7e2dc2ef582cf&Exemplar=1&LAN=DE A1 Yong Chan Jung A1 Su Min Hwang A1 Dan N. Le A1 Aswin L. N. Kondusamy A1 Jaidah Mohan A1 Sang Woo Kim A1 Jin Hyun Kim A1 Antonio T. Lucero A1 Arul Ravichandran A1 Harrison Sejoon Kim A1 Si Joon Kim A1 Rino Choi A1 Jinho Ahn A1 Daniel Alvarez A1 Jeff Spiegelman A1 Jiyoung Kim PB MDPI AG YR 2020 K1 atomic layer deposition (ALD) K1 aluminum nitride K1 hydrazine K1 trimethyl aluminum (TMA) K1 Technology K1 T K1 Electrical engineering. Electronics. Nuclear engineering K1 TK1-9971 K1 Engineering (General). Civil engineering (General) K1 TA1-2040 K1 Microscopy K1 QH201-278.5 K1 Descriptive and experimental mechanics K1 QC120-168.85 JF https://www.mdpi.com/1996-1944/13/15/3387 LK http://dx.doi.org/https://doi.org/10.3390/ma13153387 DO https://doi.org/10.3390/ma13153387 SF ELIB - SuUB Bremen
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