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1 Ergebnisse
1
Intelligent Photolithography Corrections Using Dimensionali..:
Parag Parashar
;
Chandni Akbar
;
Tejender S. Rawat
...
https://ieeexplore.ieee.org/document/8820144/. , 2019
Link:
https://doi.org/10.1109/JPHOT.2019.2938536
RT Journal T1
Intelligent Photolithography Corrections Using Dimensionality Reductions
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:869fded1798142f08ae4d278651d11d5&Exemplar=1&LAN=DE A1 Parag Parashar A1 Chandni Akbar A1 Tejender S. Rawat A1 Sparsh Pratik A1 Rajat Butola A1 Shih H. Chen A1 Yung-Sung Chang A1 Sirapop Nuannimnoi A1 Albert S. Lin PB IEEE YR 2019 K1 Lithography K1 Diffractive imaging K1 Technologies for computing K1 Applied optics. Photonics K1 TA1501-1820 K1 Optics. Light K1 QC350-467 JF https://ieeexplore.ieee.org/document/8820144/ LK http://dx.doi.org/https://doi.org/10.1109/JPHOT.2019.2938536 DO https://doi.org/10.1109/JPHOT.2019.2938536 SF ELIB - SuUB Bremen
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