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1 Ergebnisse
1
Investigation of Ga 2 O 3 -Based Deep Ultraviolet Photodete..:
Shao-Yu Chu
;
Meng-Xian Shen
;
Tsung-Han Yeh
...
https://www.mdpi.com/1424-8220/20/21/6159. , 2020
Link:
https://doi.org/10.3390/s20216159
RT Journal T1
Investigation of Ga 2 O 3 -Based Deep Ultraviolet Photodetectors Using Plasma-Enhanced Atomic Layer Deposition System
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:8ddb96045e2142c4a5f55c880a70c80d&Exemplar=1&LAN=DE A1 Shao-Yu Chu A1 Meng-Xian Shen A1 Tsung-Han Yeh A1 Chia-Hsun Chen A1 Ching-Ting Lee A1 Hsin-Ying Lee PB MDPI AG YR 2020 K1 detectivity K1 gallium oxide films K1 plasma-enhanced atomic layer deposition system K1 metal-semiconductor-metal ultraviolet C photodetectors K1 photoresponsivity K1 X-ray photoelectron spectroscopy spectra K1 Chemical technology K1 TP1-1185 JF https://www.mdpi.com/1424-8220/20/21/6159 LK http://dx.doi.org/https://doi.org/10.3390/s20216159 DO https://doi.org/10.3390/s20216159 SF ELIB - SuUB Bremen
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