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1 Ergebnisse
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Aluminum nitride on insulator: Material and processing opti..:
Spettel Jasmin
;
Andrianov Nikolai
;
Dubois Florian
...
https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_01004.pdf. , 2023
Link:
https://doi.org/10.1051/epjconf/202328701004
RT Journal T1 <Title>Aluminum nitride on insulator: Material and processing optimization for integrated photonic applications</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:9f647469770542f2a47d887d48a41432&Exemplar=1&LAN=DE A1 Spettel Jasmin A1 Andrianov Nikolai A1 Dubois Florian A1 Furci Hernán A1 Cassese Tommaso A1 Liffredo Marco A1 Villanueva Guillermo A1 Quack Niels A1 Moridi Mohssen A1 Dao Thang Duy PB EDP Sciences YR 2023 K1 Physics K1 QC1-999 JF https://www.epj-conferences.org/articles/epjconf/pdf/2023/13/epjconf_eosam2023_01004.pdf LK http://dx.doi.org/https://doi.org/10.1051/epjconf/202328701004 DO https://doi.org/10.1051/epjconf/202328701004 SF ELIB - SuUB Bremen
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