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Diagnostics of impurity composition of high-purity monosila..:
Vladimir A. Gavva
;
Anatolii V. Gusev
;
Tatiana V. Kotereva
http://www.sciencedirect.com/science/article/pii/S2452177916300822. , 2016
Link:
https://doi.org/10.1016/j.moem.2016.11.002
RT Journal T1
Diagnostics of impurity composition of high-purity monosilane by results of the analysis of a test silicon single crystal
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:a68921dc03ad4c05b31d8d0d05f3c21e&Exemplar=1&LAN=DE A1 Vladimir A. Gavva A1 Anatolii V. Gusev A1 Tatiana V. Kotereva PB Pensoft Publishers YR 2016 K1 Monosilane K1 Polycrystalline silicon K1 Single crystals K1 Isotopes K1 IR-spectroscopy K1 Impurity K1 Electronics K1 TK7800-8360 JF http://www.sciencedirect.com/science/article/pii/S2452177916300822 LK http://dx.doi.org/https://doi.org/10.1016/j.moem.2016.11.002 DO https://doi.org/10.1016/j.moem.2016.11.002 SF ELIB - SuUB Bremen
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