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1 Ergebnisse
1
A closed-loop constant deposition current control method ba..:
Xiaobo Liao
;
Jian Zhuang
;
Yalou Deng
...
http://dx.doi.org/10.1063/1.5133878. , 2020
Link:
https://doi.org/10.1063/1.5133878
RT Journal T1 <Title>A closed-loop constant deposition current control method based on MCED circuit model</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:aabe562ccfe94d858be8139eb810edd1&Exemplar=1&LAN=DE A1 Xiaobo Liao A1 Jian Zhuang A1 Yalou Deng A1 Zhiwu Wang A1 Qiangqiang Zheng A1 Yong Cai A1 Xingyuan Lu PB AIP Publishing LLC YR 2020 K1 Physics K1 QC1-999 JF http://dx.doi.org/10.1063/1.5133878 LK http://dx.doi.org/https://doi.org/10.1063/1.5133878 DO https://doi.org/10.1063/1.5133878 SF ELIB - SuUB Bremen
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