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1 Ergebnisse
1
Porous Silicon Carbide for MEMS:
Markus Leitgeb
;
Christopher Zellner
;
Georg Pfusterschmied
..
https://www.mdpi.com/2504-3900/1/4/297. , 2017
Link:
https://doi.org/10.3390/proceedings1040297
RT Journal T1
Porous Silicon Carbide for MEMS
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:ab57d14fabf74b3ebeb0f3f64a9c0ef2&Exemplar=1&LAN=DE A1 Markus Leitgeb A1 Christopher Zellner A1 Georg Pfusterschmied A1 Michael Schneider A1 Ulrich Schmid PB MDPI AG YR 2017 K1 metal assisted etching K1 Silicon Carbide K1 chemical vapor deposition K1 General Works K1 A JF https://www.mdpi.com/2504-3900/1/4/297 LK http://dx.doi.org/https://doi.org/10.3390/proceedings1040297 DO https://doi.org/10.3390/proceedings1040297 SF ELIB - SuUB Bremen
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