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Database Development of SiO 2 Etching with Fluorocarbon Pla..:
Youngseok Lee
;
Heejung Yeom
;
Daehan Choi
...
https://www.mdpi.com/2079-4991/12/21/3828. , 2022
Link:
https://doi.org/10.3390/nano12213828
RT Journal T1
Database Development of SiO 2 Etching with Fluorocarbon Plasmas Diluted with Various Noble Gases of Ar, Kr, and Xe
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:ab741a0d8c9c4316b096f05edf676672&Exemplar=1&LAN=DE A1 Youngseok Lee A1 Heejung Yeom A1 Daehan Choi A1 Sijun Kim A1 Jangjae Lee A1 Junghyung Kim A1 Hyochang Lee A1 ShinJae You PB MDPI AG YR 2022 K1 plasma etching K1 plasma chemistry K1 noble gas K1 plasma diagnostics K1 Chemistry K1 QD1-999 JF https://www.mdpi.com/2079-4991/12/21/3828 LK http://dx.doi.org/https://doi.org/10.3390/nano12213828 DO https://doi.org/10.3390/nano12213828 SF ELIB - SuUB Bremen
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