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Characterization of oxide barrier layers prepared by atomic..:
Fa-Ta Tsai
;
Ching-Kong Chao
;
Kai-Jyun Jhong
.
https://doi.org/10.1177/1687814017711809. , 2017
Link:
https://doi.org/10.1177/1687814017711809
RT Journal T1 <Title>Characterization of oxide barrier layers prepared by atomic layer deposition</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:b70b410dab474dbc979d19805c5a4ca0&Exemplar=1&LAN=DE A1 Fa-Ta Tsai A1 Ching-Kong Chao A1 Kai-Jyun Jhong A1 Rwei-Ching Chang PB SAGE Publishing YR 2017 K1 Mechanical engineering and machinery K1 TJ1-1570 JF https://doi.org/10.1177/1687814017711809 LK http://dx.doi.org/https://doi.org/10.1177/1687814017711809 DO https://doi.org/10.1177/1687814017711809 SF ELIB - SuUB Bremen
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