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1 Ergebnisse
1
Long-Term Degradation Evaluation of the Mismatch of Sensiti..:
Xinlong Huang
;
Xianshan Dong
;
Guizhen Du
.
https://www.mdpi.com/2072-666X/14/1/190. , 2023
Link:
https://doi.org/10.3390/mi14010190
RT Journal T1
Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:b9b0737dd38845249baba22bff68ae12&Exemplar=1&LAN=DE A1 Xinlong Huang A1 Xianshan Dong A1 Guizhen Du A1 Youwang Hu PB MDPI AG YR 2023 K1 MEMS accelerometer K1 mismatch of sensitive capacitance K1 long-term reliability K1 Mechanical engineering and machinery K1 TJ1-1570 JF https://www.mdpi.com/2072-666X/14/1/190 LK http://dx.doi.org/https://doi.org/10.3390/mi14010190 DO https://doi.org/10.3390/mi14010190 SF ELIB - SuUB Bremen
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