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1 Ergebnisse
1
Dry Etching Performance and Gas-Phase Parameters of C 6 F 1..:
Nomin Lim
;
Yeon Sik Choi
;
Alexander Efremov
.
https://www.mdpi.com/1996-1944/14/7/1595. , 2021
Link:
https://doi.org/10.3390/ma14071595
RT Journal T1
Dry Etching Performance and Gas-Phase Parameters of C 6 F 12 O + Ar Plasma in Comparison with CF 4 + Ar
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:bab1bbbecc06412aa83a26dd7f1a66c9&Exemplar=1&LAN=DE A1 Nomin Lim A1 Yeon Sik Choi A1 Alexander Efremov A1 Kwang-Ho Kwon PB MDPI AG YR 2021 K1 global warming potential K1 C 6 F 12 O-containing plasma K1 Si and SiO 2 etching rates K1 plasma diagnostics K1 reaction kinetics K1 polymerization K1 Technology K1 T K1 Electrical engineering. Electronics. Nuclear engineering K1 TK1-9971 K1 Engineering (General). Civil engineering (General) K1 TA1-2040 K1 Microscopy K1 QH201-278.5 K1 Descriptive and experimental mechanics K1 QC120-168.85 JF https://www.mdpi.com/1996-1944/14/7/1595 LK http://dx.doi.org/https://doi.org/10.3390/ma14071595 DO https://doi.org/10.3390/ma14071595 SF ELIB - SuUB Bremen
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